半导体工艺英语名词解释Word版

半导体工艺英语名词解释

CMP

CMP 是哪三个英文单词的缩写？

答：Chemical Mechanical Polishing (化学机械研磨)

CMP是哪家公司发明的？

答：CMP是IBM在八十年代发明的。

简述CMP的工作原理？

答：化学机械研磨是把芯片放在旋转的研磨垫(pad)上，再加一定的压力，用化学研磨液(slurry)来研磨的。

为什幺要实现芯片的平坦化？

答：当今电子元器件的集成度越来越高，例如奔腾IV就集成了四千多万个晶体管，要使这些晶体管能够正常工作，就需要对每一个晶体管加一定的电压或电流，这就需要引线来将如此多的晶体管连接起来，但是将这幺多的晶体管连接起来，平面布线是不可能的，只能够立体布线或者多层布线。在制造这些连线的过程中，层与层之间会变得不平以至不能多层迭加。用CMP来实现平坦化，使多层布线成为了可能。

CMP在什幺线宽下使用？

答：CMP在0.25微米以下的制程要用到。

什幺是研磨速率（removal rate）?

答：研磨速率是指单位时间内研磨膜厚度的变化。

研磨液(slurry)的组成是什幺？

答：研磨液是由研磨颗粒(abrasive particles)，以及能对被研磨膜起化学反应的化学溶液组成。

为什幺研磨垫(Pad)上有一些沟槽(groove)？

答：研磨垫上的沟槽是用来使研磨液在研磨垫上达到均匀分布，使得研磨后芯片上的膜厚达到均匀。

为什幺要对研磨垫进行功能恢复(conditioning)?

答：研磨垫在研磨一段时间后，就有一些研磨颗粒和研磨下来的膜的残留物留在研磨垫上和沟道内,这些都会影响研磨液在研磨垫的分布,从而影响研磨的均匀性。

什幺是blanket wafer ？什幺是pattern wafer ？

答：

blanket wafer 是指无图形的芯片。pattern wafer 是指有图形的芯片。

Blanket wafer 与pattern wafer的removal rate会一样吗？

答：一般来说，blanket wafer与pattern wafer的removal rate是不一样的。

为什幺Blanket wafer 与pattern wafer的removal rate会不一样？

答：Blanket wafer 与pattern wafer的removal rate不一样是由于pattern wafer上有的地方高，有的地方低，高的地方压强(pressure)大，研磨速度大（回想Preston关系式）。而且，总的接触到研磨的面积要比Blanket wafer接触到研磨的面积要小，所以总的压强大，研磨速度大。

在研磨后，为什幺要对芯片进行清洗？

答：芯片在研磨后，会有大量的研磨颗粒和其它一些残留物留在芯片上，这些是对后面的工序有害，必须要清洗掉。

CMP (process tool)分为几类？

答：对不同膜的研磨，CMP分为Oxide, W, Poly, Cu CMP等。

CMP常见的缺陷（defect）是什幺？

答：CMP常见的缺陷有划伤(scratch), 残留物(residue), 腐蚀（corrosion）.

W Remove Rate 用什幺方法来测？

答：W是指Tungsten (钨), remove rate是指化学机械研磨速率，即单位时间内厚度的变化。由于钨是不透光的物质，其厚度的测试需由测方块电阻(sheet resistance or Rs)的机台来测量。

用来测定Oxide Thickness的方法是什幺？

答：由于二氧化硅(Oxide)是透明的，所以通常测量二氧化硅的厚度（Thickness）用椭偏光法。

为什幺要测particle(尘粒)？

答：外来的particle对半导体器件的良率有很大的影响，所以在半导体器件的制造过程中一定要对尘粒进行严格的控制。

用光学显微镜检查芯片的重点是什幺？

答：用光学显微镜（

Optical Microscope or OM）可以观察到大的缺陷如(1) 划伤（scratch）,(2) 残留物（residue）CMP 区Daily monitor日常测机主要做哪些项目？

答：任何机台的特性（performance）会随时间的变化而变化。日常测机是用来检测机台是否处于正常的工作状态。CMP的日常测机通常要测以下一些项目：(1) removal rate (2) particle (3) uniformity CMP区域哪些机台可以共享一种dummy wafer,哪些不能？

答：W DUMMY 只能用于w机台，poly dummy 只能用于poly机台，OXIDE dummy可以共享。

什幺是over polish?

答：化学机械研磨是去掉芯片上的膜的高低不平的部分，从而达到平坦化或所需要的图形。如果研磨掉膜的厚度比预定的厚度要大，就叫overpolish。 Overpolish后的芯片是不可挽救的。

什幺是under polish?

答：如果研磨掉膜的厚度比预定的厚度要小，就叫underpolish。Underpolish后的芯片可以通过重新研磨来补救。

CMP 研磨机台由哪几部分组成？

答：CMP机台由芯片机械传送装置，研磨和清洗等组成

CMP区域的consumables (易耗品)通常是指哪些？

答：CMP区域的consumables (易耗品)通常是指研磨液，研磨垫，清洗用的刷（brush）, diamond disk(金刚石盘)等。

FA

1. SEM 的用途?

答：用途:形貌观察与量测参考,截面观察与TOP VIEW观察

2. SEM-4700和SEM-5200的加速电压分别为多少?

答：0.5KV~30KV

3. 送TEMcase时工程师要注意什幺事

答：(1) 送件时

:Please cap oxide or nitride layer以方便分析者分辨其接口以及避免研磨时peeling (2) Request需用OM相片或手绘清楚地标示其 top view and X-section structure (3) FA engineer 会与委托者讨论与建议其试片之处理方式

4. 我们所用TEM的加速电压为多少？

答：200KV

5. EDX的用途?

答：Fast Element Microanalysis(快速元素微分析)Line scanning (线扫描)Mapping (面扫描)

6. EDX 是那三个字的缩写

答：Energy Dispersive Spectrometry(能量分析光谱仪)

7. FIB的用途?

答：(1) 作定点切削并边切边观察 (2) 电路修补 (3) TEM样品制作

8. 做FIB case时工程师要注意什幺事?

答：(1) Top layer is polyimide or Oxide layer时需提前二小时送件以便有充份时间处理样品 (2) 请注明试片之Top layer是何种材质.(3) Request KLA defect map analysis须提前将data file transfer 至Knight system

9. SEM是哪三个字的缩写？中文名称是什幺？

答：Scanning Electron Microscope,中文是扫描式电子显微镜

10. SEM-4700和SEM-5200的分辨率分别为多少?

答：S-4700可以达到1.5nm@15KVS-5200可以达到0.5nm@30KV

11. SEM-4700和SEM-5200 主要的区别是什幺?

答：(1) S-5200 比S-4700的分辨率高,(S-5200分辨率为0.5nm at 30kV,1.8nm at 1KV)(S-4700分辨率为1.5nm at 15kV,2.5nm at 1KV )(2) S-4700一次能同时放约8片试片而S-5200只能一次一个试片,而S-5200只能看样品的Cross section. (3) 倍率低于150kx在S-4700分析,倍率高于150kx在S-5200分析

12. TEM是哪三个字的缩写？中文名称是什幺？

答：Transmission Electron Microscope,中文是穿透式电子显微镜

13. 当使用TEM来观测样品时，为求图象清晰，需要镀金或用Chemical吗？

答：不需要，只要将样品处理到一定的厚度(大约1um)，便于电子束穿过即可。

14. 我们的TEM需用到底片拍照吗？

答：不需要。我们的TEM是用CCD成像，照片以电子档的形式提供给客户。

15. 我们所用TEM的分辨率为多少？

答： 0.248nm点分辨率(能分辨一点与另一点)；0.102nm线分辨率(能分辨线与线之间距离)。

16. TEM有哪些应用？

答：微区结构，形貌观察；晶体结构分析；微区成份分析；超薄氧化层厚度测量等。

17. 我们的SEM,FIB,TEM需要用到底片吗？

答：不需要，照片都是以电子档的形式提供给客户。

18. EDX对样品有何要求？

答：(1) 样品要尽可能地使表面平滑(2) 取样的样品数要足够(如粉末状样品)以便置于SEM内做EDX分析(3) 如charging样品中确定不含有导电物铂(Pt),则可以镀金以防charging

19. EDX中加液氮的作用是什幺？

答：冷却EDX探头。

20. TEM EDX和SEM EDX相比有哪些优缺点？

答：(1) TEM EDX空间分辨率较SEM EDX高. (2) TEM试片较SEM试片薄所以其电子束穿透 (3) TEM试片准备较SEM试片复杂

21. FIB是哪三个字的缩写？中文名称是什幺？

答：Focus Ion Beam,中文是聚焦离子束

22. Auger 仪器能分析到多少深度的信号?

答：大约是表面 50?

23. 申请做FA case的一般过程是什幺？

答：要详细填好FA request form(detailed background information& expectation)。并由manager签署认可,委托单若信息模糊，描述不清将会被拒收。与FA人员讨论，进一步提供表格上不便表

达的信息24.

Wafer sent to FA lab注意事项？

答：芯片需用芯片盒装好, 不可以夹在笔记本内或用塑料袋装, 尤其是光阻或需要表面分析的芯片表面更不能压到或污染, 另外送TEM表面分析的芯片最好再上一层OXIDE or NITEIDE以保护欲观察layer避免PEELIN

（注：可编辑下载，若有不当之处，请指正，谢谢!）

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