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DISS

DISS (Diameter Index Safety Standard) cylinder connections are
used in the Semiconductor industry where the highest levels of 8 [) B; ~3 ^& m! s; m, T
purity and the lowest leak rate connections are required.
Standard DISS connections are available in models that connect
to the cylinder and convert to 1/4" NPT male, 1/4" tube stub, or
1/4" face seal male (note: face seal is VCR® compatible). All 6 S4 m/ S3 Q/ ]0 j4 P2 W
models are made from 316L stainless steel and are supplied & [8 ~9 L$ x6 ^, ?5 |/ `- W
with a nickel sealing gasket. The table below lists the gas & F3 W- g$ ?" i' y' Z1 u5 @9 `
assignments for the various connections as of October 1, 1994.3 N8 z* b& Q/ k4 _+ N1 D$ F

CGA 632 Arsine, Diborane, Disilane, Germane, Phosphine, Silane, Hydrogen Selenide
CGA 634 Hydrogen Chloride, Chlorine, Boron Trichloride, Hydrogen Bromide
CGA 636 Dichlorosilane, Trichlorosilane, Silicon Tetrachloride S0 x9 \# S: r- }
CGA 638 Tungsten Hexafluoride, Hydrogen Fluoride) V: e5 W3 E0 t) X ^
CGA 640 Nitrogen Trifluoride
CGA 642 Boron Trifluoride, Silicon Tetrafluoride, Phosphorus Pentafluoride, Arsenic Pentafluoride
CGA 712 Nitrous Oxide7 W: K( N4 a7 Y
CGA 714 Oxygen# i2 f& y6 s- E: m) E: g
CGA 716 Carbon Dioxide, Sulfur Hexafluoride, Halocarbons 11, 12, 13, 14, 23, 115, 116, Perfluoropropane
CGA 718 Nitrogen, Neon, Helium, Argon, Xenon, Krypton
CGA 720 Ammonia! C! h8 f. T8 {9 i
CGA 722 Hydrogen Sulfide
CGA 724 Hydrogen, Carbon Monoxide
CGA 726 Diethylzinc, Dimethylzinc, Trimethylaluminum, Dimethyl telluride
CGA 728 Chlorine

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